By the time series model, this paper constncted the disturbance model for the aluminum sputter deposition process, and derived the Autoregressive integrated Moving Average and Least-Square (ARIMA-LS) controller based on this new disturbance model. Experim By the time series model, this paper constncted the disturbance model for the aluminum sputter deposition process, and derived the Autoregressive integrated Moving Average and Least-Square (ARIMA-LS) controller based on this new disturbance model. Experim
