Chung-Hua University Repository:Item 987654321/34981
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    Please use this identifier to cite or link to this item: http://chur.chu.edu.tw/handle/987654321/34981


    Title: Advanced Process Control of Mix-Product Semiconductor Processes
    Authors: 陳俊宏
    Chen, Juhn-Horng
    Contributors: 機械工程學系
    Mechanical Engineering
    Keywords: Mix-Product;Semiconductor Processes;Run-To-Run Control;Measurement Delay
    Date: 2010
    Issue Date: 2014-06-27 03:15:47 (UTC+8)
    Abstract: This paper developed an advanced control technique for mix-product semiconductor processes
    with measurement delay. The conventional run-to-run process control for single-type-product processes was
    improved to that for mix-product processes through individ
    Appears in Collections:[Department of Mechanical Engineering] Seminar papers

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