Recent developments on microablation of glass materials
using excimer lasers

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题名:	Recent developments on microablation of glass materials using excimer lasers
作者:	馬廣仁 Ma, Kung-Jen
贡献者:	機械工程學系 Mechanical Engineering
关键词:	Ablation;curved surface;excimer laser;fused silica;glass;diffraction grating;microlens;micromachining;microneedles;and waveguides Ablation;curved surface;excimer laser;fused silica;glass;diffraction grating;microlens;micromachining;microneedles;and waveguides
日期:	2007
上传时间:	2014-06-27 03:13:34 (UTC+8)
摘要:	For many years, the development of effective laser machining techniques for making glass-based micro-components and devices has been a critical factor in the birth of new photonic and biomedical microsystems. In this article, the characteristics and abili For many years, the development of effective laser machining techniques for making glass-based micro-components and devices has been a critical factor in the birth of new photonic and biomedical microsystems. In this article, the characteristics and abili
显示于类别:	[機械工程學系] 期刊論文

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