Recent developments on microablation of glass materials
using excimer lasers

CHUR > College of Engineering > Department of Mechanical Engineering > Journal Articles > Item 987654321/34944

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Title:	Recent developments on microablation of glass materials using excimer lasers
Authors:	馬廣仁 Ma, Kung-Jen
Contributors:	機械工程學系 Mechanical Engineering
Keywords:	Ablation;curved surface;excimer laser;fused silica;glass;diffraction grating;microlens;micromachining;microneedles;and waveguides Ablation;curved surface;excimer laser;fused silica;glass;diffraction grating;microlens;micromachining;microneedles;and waveguides
Date:	2007
Issue Date:	2014-06-27 03:13:34 (UTC+8)
Abstract:	For many years, the development of effective laser machining techniques for making glass-based micro-components and devices has been a critical factor in the birth of new photonic and biomedical microsystems. In this article, the characteristics and abili For many years, the development of effective laser machining techniques for making glass-based micro-components and devices has been a critical factor in the birth of new photonic and biomedical microsystems. In this article, the characteristics and abili
Appears in Collections:	[Department of Mechanical Engineering] Journal Articles

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