This research integrated a MEMS electrostatic driven microprobe and a laser Doppler vibrometer for non-contact vibration mode scanning probe microscope system design. The microprobe tip was placed in perpendicular to the sample surface, and the built-in c This research integrated a MEMS electrostatic driven microprobe and a laser Doppler vibrometer for non-contact vibration mode scanning probe microscope system design. The microprobe tip was placed in perpendicular to the sample surface, and the built-in c
