Non-Contact Mode SPM System Design with MEMS Micro-Cantilever Probe

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题名:	Non-Contact Mode SPM System Design with MEMS Micro-Cantilever Probe
作者:	林君明 Lin, Jium-Ming
贡献者:	機械工程學系 Mechanical Engineering
关键词:	SPM;MEMS;Non-Contact;laser Doppler vibrometer SPM;MEMS;Non-Contact;laser Doppler vibrometer
日期:	2008
上传时间:	2014-06-27 02:51:34 (UTC+8)
摘要:	This research integrated a MEMS electrostatic driven microprobe and a laser Doppler vibrometer for non-contact vibration mode scanning probe microscope system design. The microprobe tip was placed in perpendicular to the sample surface, and the built-in c This research integrated a MEMS electrostatic driven microprobe and a laser Doppler vibrometer for non-contact vibration mode scanning probe microscope system design. The microprobe tip was placed in perpendicular to the sample surface, and the built-in c
显示于类别:	[機械工程學系] 研討會論文

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