The vertical probe of this paper used Si-wafer as substrate. The key point was to use buffer layers of low k elastomer to release uneven forces due to either non-uniform height of probe tips by the fabrication process, or uneven strains and stresses durin The vertical probe of this paper used Si-wafer as substrate. The key point was to use buffer layers of low k elastomer to release uneven forces due to either non-uniform height of probe tips by the fabrication process, or uneven strains and stresses durin
