| Title: | Wafer Level Test Vertical Probe Design |
| Authors: | 林君明
Lin, Jium-Ming |
| Contributors: | 機械工程學系
Mechanical Engineering |
| Keywords: | Wafer level test;Vertical probe;Low k elastomer
Wafer level test;Vertical probe;Low k elastomer |
| Date: | 2008 |
| Issue Date: | 2014-06-27 02:50:32 (UTC+8) |
| Abstract: | The vertical probe of this paper used Si-wafer as substrate. The key point was to use buffer layers of low k elastomer to release uneven forces due to either non-uniform height of probe tips by the fabrication process, or uneven strains and stresses durin
The vertical probe of this paper used Si-wafer as substrate. The key point was to use buffer layers of low k elastomer to release uneven forces due to either non-uniform height of probe tips by the fabrication process, or uneven strains and stresses durin |
| Appears in Collections: | [Department of Mechanical Engineering] Seminar papers
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