| 題名: | Scanning Probe Microscope System Design with Linear Velocity Transducer for Feedback Compensation |
| 作者: | 林君明
Lin, Jium-Ming |
| 貢獻者: | 機械工程學系
Mechanical Engineering |
| 關鍵詞: | LVT;LVDT;Load cell;Surface profiler
LVT;LVDT;Load cell;Surface profiler |
| 日期: | 2008 |
| 上傳時間: | 2014-06-27 02:48:49 (UTC+8) |
| 摘要: | This research is to use Linear Velocity Transducer (LVT) to detect the vertical velocity of the stylus probe for the inner-loop damping and transient control of a force actuator. This improvement has been verified by MATLAB simulation and practical implem
This research is to use Linear Velocity Transducer (LVT) to detect the vertical velocity of the stylus probe for the inner-loop damping and transient control of a force actuator. This improvement has been verified by MATLAB simulation and practical implem |
| 顯示於類別: | [機械工程學系] 研討會論文
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