This research is to use intelligent fuzzy control for a Scanning Probe Microscope (SPM) system design to reduce the hysteresis effect of the force actuator. In which a balance with stylus probe, force actuator, LVDT (Linear Variable Differential Transform This research is to use intelligent fuzzy control for a Scanning Probe Microscope (SPM) system design to reduce the hysteresis effect of the force actuator. In which a balance with stylus probe, force actuator, LVDT (Linear Variable Differential Transform
