Chung-Hua University Repository:Item 987654321/32348
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    Please use this identifier to cite or link to this item: http://chur.chu.edu.tw/handle/987654321/32348


    Title: Intelligent Fuzzy Control of a Scanning Probe Microscope System Design
    Authors: 林君明
    Lin, Jium-Ming
    Contributors: 通訊工程學系
    Communication Engineering
    Keywords: LVDT;Load cell;Surface profiler;Intelligent fuzzy control;Hysteresis effect
    LVDT;Load cell;Surface profiler;Intelligent fuzzy control;Hysteresis effect
    Date: 2009
    Issue Date: 2014-06-27 01:52:03 (UTC+8)
    Abstract: This research is to use intelligent fuzzy control for a Scanning Probe
    Microscope (SPM) system design to reduce the hysteresis effect of the force actuator. In
    which a balance with stylus probe, force actuator, LVDT (Linear Variable Differential
    Transform
    This research is to use intelligent fuzzy control for a Scanning Probe
    Microscope (SPM) system design to reduce the hysteresis effect of the force actuator. In
    which a balance with stylus probe, force actuator, LVDT (Linear Variable Differential
    Transform
    Appears in Collections:[Department of Communication Engineering] Journal Articles

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