Chung-Hua University Repository:Item 987654321/32084
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    Please use this identifier to cite or link to this item: http://chur.chu.edu.tw/handle/987654321/32084


    Title: Nanoscale scratching of platinum thin films using atomic force microscopy with DLC tips
    Authors: 馬廣仁
    Ma, Kung-Jen
    Contributors: 工程科學博士學位學程
    Ph.D. Program in Engineering Science
    Keywords: Atomic force microscope/microscopy;MEMS;Machining;Platinum thin-film;Scratching;Scratch cycle number;Threshold force
    Date: 2012
    Issue Date: 2014-06-27 01:43:53 (UTC+8)
    Abstract: AFM (atomic force microscopy) scratching is a simple yet versatile material removing technique for micro- and nano-patterning. In this article, AFM scratching experiments were conducted to investigate the scratching characteristics of platinum thin-films
    Appears in Collections:[Ph.D.Program in Engineering Science] Journal Articles

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