多晶矽太陽能晶片之微隱裂檢測

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Title:	多晶矽太陽能晶片之微隱裂檢測
Authors:	邱奕契 Chiou, Yih-Chih
Contributors:	機械工程學系 Mechanical Engineering
Keywords:	微裂紋;瑕疵偵測;區域成長;太陽能晶片;近紅外線取像 Keywords: Micro Crack;Flaw Detection;Region Growing;Solar Wafer;NIR Imaging.
Date:	2010
Issue Date:	2014-07-31 11:37:10 (UTC+8)
Abstract:	檢測多晶矽太陽能晶片中的不可見微裂紋並不是一件容易的事，這是因為其所特有的異方向性紋理背景。此困難可從兩方面來說明。首先取像設備必需看的到隱藏於晶片內部的微裂紋。其次，軟體程式必需將微裂紋從影像中抽取出來。本研究首先建立一套能夠攫取到微裂紋影像的近紅外線取像系統解決了第一個問題。接著我們以區域成長法為基礎，發展出有能力從攫取所得影像中抽取出微裂紋的瑕疵偵測演算法。實驗結果顯示，本研究所提出之微裂紋檢測系統除了可以有效偵測出微裂紋外，也可以用來檢查矽晶片是否有玷污、針孔、異物、及裂痕等瑕疵。系統之整體精確度 To discover invisible micro cracks from a multi-crystalline silicon solar wafer image is not an easy task because of its heterogeneously textured background. The difficulty is twofold. First, invisible micro cracks must be visualized to imaging devices. S
Appears in Collections:	[Department of Mechanical Engineering] Teachers Books

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