| 題名: | Simulation for Hot-rolling Nanoimprint Process |
| 作者: | 蔡博章
Tsai, Bor-Jang |
| 貢獻者: | 機械工程學系
Mechanical Engineering |
| 關鍵詞: | Nanoimprint etching;hot-press forming;nanoimprint lithography
Nanoimprint etching;hot-press forming;nanoimprint lithography |
| 日期: | 2008 |
| 上傳時間: | 2014-06-27 03:26:30 (UTC+8) |
| 摘要: | Nanoimprint lithography is a novel method of fabricating nanometer scale patterns such as molds (cores) with micro/nano structures by mechanical deformation of imprint resist and subsequent processes. The imprint resist is typically a monomer or polymer f
Nanoimprint lithography is a novel method of fabricating nanometer scale patterns such as molds (cores) with micro/nano structures by mechanical deformation of imprint resist and subsequent processes. The imprint resist is typically a monomer or polymer f |
| 顯示於類別: | [機械工程學系] 研討會論文
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