Mixed-Product Run-by-Run Process Control

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Title:	Mixed-Product Run-by-Run Process Control
Authors:	陳俊宏 Chen, Juhn-Horng
Contributors:	機械工程學系 Mechanical Engineering
Keywords:	變異數分析;時間序列模型;擴張卡曼濾波器 ANOVA;time series model;extended Kalman filter
Date:	2011
Issue Date:	2014-06-27 03:16:12 (UTC+8)
Abstract:	本研究針對混貨的半導體製程，發展出一套批次控制技術。文中利用機台的歷史資料進行變異數分析(ANOVA)與建立製程的時間序列模型，然後利用擴張卡曼濾波器同時估計預測值與更新製程模型參數。電腦模擬結果顯示本文所提出的方法比時間序列控制器、D-EWMA控制器與時變D-EWMA控制器有更好的預測效能表現。 This paper developed a technique for controlling mix-product semiconductor processes. The ANOVA and the time series model is constructed by history data and then the extended Kalman filter is used to estimate the disturbances and update the parameters of
Appears in Collections:	[Department of Mechanical Engineering] Seminar papers

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