Nanoimprint lithography is a novel method of fabricating nanometer scale patterns such as molds (cores) with micro/nano structures by mechanical deformation of imprint resist and subsequent processes. The imprint resist is typically a monomer or polymer f Nanoimprint lithography is a novel method of fabricating nanometer scale patterns such as molds (cores) with micro/nano structures by mechanical deformation of imprint resist and subsequent processes. The imprint resist is typically a monomer or polymer f
