Application of Computer Vision and Laser Interferometer to 2D Inspection

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Title:	Application of Computer Vision and Laser Interferometer to 2D Inspection
Authors:	羅鵬飛 Luo, Perng-Fei
Contributors:	機械工程學系 Mechanical Engineering
Date:	2005
Issue Date:	2014-06-27 02:56:09 (UTC+8)
Abstract:	In the paper laser interferometer, vision system and a two-dimensional precision translation stage are used to develop a high precision measuring station with a working range of 18 mm × 18 mm. The vision system is installed at the Z-axis of a coordinate m
Appears in Collections:	[Department of Mechanical Engineering] Seminar papers

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