This research applied both the traditional PI (Proportion and Integration) compensator and the fuzzy control methods for a Scanning Probe Microscope (SPM) system design. In addition, the actuator hysteresis effect was taken into consideration. It can be This research applied both the traditional PI (Proportion and Integration) compensator and the fuzzy control methods for a Scanning Probe Microscope (SPM) system design. In addition, the actuator hysteresis effect was taken into consideration. It can be
