ANNEALING TEMPERATURE EFFECT ON THE SENSITIVITY OF SIGE NANOWIRE FOR BIO-SENSOR

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Title:	ANNEALING TEMPERATURE EFFECT ON THE SENSITIVITY OF SIGE NANOWIRE FOR BIO-SENSOR
Authors:	賴瓊惠 Lai, Chiung-Hui
Contributors:	電子工程學系 Electronics Engineering
Keywords:	矽奈米線;矽鍺;生物感測器 Silicon nanowire;SiGe;bio-sensor;3-amino-propyltrime-thoxy-silane;APTS
Date:	2011
Issue Date:	2014-06-27 02:30:29 (UTC+8)
Abstract:	退火的溫度對矽鍺奈米線在生物感測的敏感度的影響 Nanowire is widely used in biological sensor because it has the high surface-to-volume ratio. Germanium (Ge) would be beneficial to enhance the sensitivity of silicon nanowire for bio-sensor. In this study, we have successfully fabricated the SiGe on Insu
Appears in Collections:	[Department of Microelectronics] Seminar Papers

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