Numerical investigations of geometric effects on flow and thermal fields in a horizontal CVD reactor

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Title:	Numerical investigations of geometric effects on flow and thermal fields in a horizontal CVD reactor
Authors:	鄭藏勝 Cheng, T. S.
Contributors:	機械工程學系 Mechanical Engineering
Keywords:	A1;Computer simulations;A1;Convection;A1;Fluid flow;A3;MOCVD
Date:	2008
Issue Date:	2014-06-27 02:23:27 (UTC+8)
Abstract:	This paper investigates numerically the effects of tilted angle of the susceptor and the upper wall and of addition of a rib on the three-dimensional (3-D) flow structures and heat transfer characteristics in a model horizontal chemical vapor deposition (
Appears in Collections:	[Department of Mechanical Engineering] Journal Articles

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