Reducing Hysteresis Effect of Force Actuator in a Scanning Probe Microscope

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Title:	Reducing Hysteresis Effect of Force Actuator in a Scanning Probe Microscope
Authors:	林君明 Lin, Jium-Ming
Contributors:	通訊工程學系 Communication Engineering
Keywords:	SPM;LVT;LVDT;Load cell;PI compensator;Force actuator;Hysteresis effect SPM;LVT;LVDT;Load cell;PI compensator;Force actuator;Hysteresis effect
Date:	2009
Issue Date:	2014-06-27 02:05:22 (UTC+8)
Abstract:	This research is to use only PI controllers to reduce the hysteresis effect of a force actuator for a Scanning Probe Microscope (SPM). Comparisons with the previous design with Linear Velocity Transducer (LVT) for inner-loop feedback compensation are also This research is to use only PI controllers to reduce the hysteresis effect of a force actuator for a Scanning Probe Microscope (SPM). Comparisons with the previous design with Linear Velocity Transducer (LVT) for inner-loop feedback compensation are also
Appears in Collections:	[Department of Communication Engineering] Seminar papers

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