题名: | Intelligent Scanning Probe Microscope System Design |
作者: | 林君明 Lin, Jium-Ming |
贡献者: | 通訊工程學系 Communication Engineering |
关键词: | Fuzzy controller;SPM;Hysteresis effect Fuzzy controller;SPM;Hysteresis effect |
日期: | 2009 |
上传时间: | 2014-06-27 02:04:28 (UTC+8) |
摘要: | Abstract—This research is to use fuzzy controller to re-duce the hysteresis effect of a force actuator for a Scanning Probe Microscope (SPM). This improvement has been verified by MATLAB simulation and practical implemen-tation to reduce the hysteresis ef Abstract—This research is to use fuzzy controller to re-duce the hysteresis effect of a force actuator for a Scanning Probe Microscope (SPM). This improvement has been verified by MATLAB simulation and practical implemen-tation to reduce the hysteresis ef |
显示于类别: | [通訊工程學系] 研討會論文
|