| 題名: | Eliminating Hysteresis Effect of Force Actuator in a SPM |
| 作者: | 林君明
Lin, Jium-Ming |
| 貢獻者: | 通訊工程學系
Communication Engineering |
| 關鍵詞: | SPM;LVT;LVDT;Fuzzy controller;PI compensator;Force actuator;Hysteresis effect
SPM;LVT;LVDT;Fuzzy controller;PI compensator;Force actuator;Hysteresis effect |
| 日期: | 2010 |
| 上傳時間: | 2014-06-27 01:54:14 (UTC+8) |
| 摘要: | This research is to use fuzzy controller to eliminate hysteresis effect of a force actuator for a
Scanning Probe Microscope (SPM). This improvement has been verified by MATLAB simulation and practical
implementation to reduce the hysteresis effect of the
This research is to use fuzzy controller to eliminate hysteresis effect of a force actuator for a
Scanning Probe Microscope (SPM). This improvement has been verified by MATLAB simulation and practical
implementation to reduce the hysteresis effect of the |
| 顯示於類別: | [通訊工程學系] 期刊論文
|
