This research is to use fuzzy controller to eliminate hysteresis effect of a force actuator for a Scanning Probe Microscope (SPM). This improvement has been verified by MATLAB simulation and practical implementation to reduce the hysteresis effect of the This research is to use fuzzy controller to eliminate hysteresis effect of a force actuator for a Scanning Probe Microscope (SPM). This improvement has been verified by MATLAB simulation and practical implementation to reduce the hysteresis effect of the
