Integrating MEMS Electro-Static Driven Micro-Probe and Laser Doppler Vibrometer for Non-Contact
Vibration Mode SPM System Design

CHUR > College of Engineering > Department of Communication Engineering > Journal Articles > Item 987654321/32413

Please use this identifier to cite or link to this item: http://chur.chu.edu.tw/handle/987654321/32413

Title:	Integrating MEMS Electro-Static Driven Micro-Probe and Laser Doppler Vibrometer for Non-Contact Vibration Mode SPM System Design
Authors:	林君明 Lin, Jium-Ming
Contributors:	通訊工程學系 Communication Engineering
Keywords:	Microprobe;Non-Contact Vibration Mode;Scanning Probe Microscope Microprobe;Non-Contact Vibration Mode;Scanning Probe Microscope
Date:	2009
Issue Date:	2014-06-27 01:53:34 (UTC+8)
Abstract:	This research integrated a MEMS electrostatic driven micro-probe and a laser Doppler vibrometer for non-contact vibration mode scanning probe microscope system design. The microprobe tip was placed in perpendicular to the sample surface, and the built-in This research integrated a MEMS electrostatic driven micro-probe and a laser Doppler vibrometer for non-contact vibration mode scanning probe microscope system design. The microprobe tip was placed in perpendicular to the sample surface, and the built-in
Appears in Collections:	[Department of Communication Engineering] Journal Articles

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